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LS-611/HMDS Hexamethyldisilazane (HMDS)
CAS NO. 999-97-3
Silfluo LS-611 is Hexamethyldisilazane (HMDS), a trimethylsilylating agent and surface modifier.
The molecule contains two trimethylsilyl groups connected by an Si–N–Si linkage with an N–H bond.
The Si–N–H reacts with active hydrogen-bearing species including silanols, hydroxyls, amines, and carboxyls, introducing trimethylsilyl groups and releasing ammonia as the sole byproduct.
Used as silylating agent in pharmaceutical and organic synthesis, adhesion promoter in semiconductor photolithography, anti-structuring process aid in HCR and LSR compounding, and surface hydrophobization agent for fumed silica and mineral fillers.
Performance equivalent to Momentive A-166, Dow Z-6079, Evonik HMDS, and Shin-Etsu HMDS3.
