Search

LS-610/HMDO Hexamethyldisiloxane (MM, HMDO)
CAS NO. 107-46-0

Silfluo LS-610 is Hexamethyldisiloxane (MM, HMDSO), a linear disiloxane with two trimethylsilyl end groups.

The molecule contains two Si–O–Si connected trimethylsilyl units; no hydrolyzable groups are present.

The trimethylsilyl end groups function as chain terminators in silicone polymer synthesis, controlling molecular weight by capping silanol chain ends.

High volatility, low surface tension, and zero residue on evaporation make it suited for precision cleaning, CVD precursor, and carrier fluid applications.

Used as end-capping agent (MM) in silicone polymer synthesis, PECVD precursor for SiO₂ film deposition, precision electronic cleaning solvent, and non-polar reaction medium.


Typical Physical Properties of LS-610/HMDO Hexamethyldisiloxane (MM, HMDO)


Silfluo Code:

LS-610

Chemical Name:

Synonyms

Hexamethyldisiloxane

HMDSO; MM;

CAS No.:

EINECS No.:

107-46-0

203-492-7

Molecular Weight:

162.38

Appearance:

Colorless clear liquid

Purity (by GC, %)

99.0 min

Silanol:

≤1.0%

Density (ρ20°C, g/cm³)

0.762-0.77 0

Refractive Index (n25/D)

1.3765-1.3785

Boiling Point:

100°C

Flash Point:

-1 °C Closed Cup


Applications of LS-610/HMDO Hexamethyldisiloxane (MM, HMDO)


1. Silicone polymer end-capping (MM)

Used as chain terminator in polymerization of silicone fluids, resins, and elastomers to control molecular weight and viscosity.

2. PECVD precursor

Used as volatile precursor in plasma-enhanced CVD processes for SiO₂ insulating film deposition in semiconductor manufacturing.

3. Precision electronic cleaning and photolithography

Used as residue-free cleaning solvent for semiconductor wafers, microelectronic equipment, and photoresist adhesion promoter carrier.

4. Pharmaceutical and analytical chemistry

Used as non-polar reaction medium, extraction solvent, and GC reference standard.

5. Mold release and surface treatment carrier

Used as carrier fluid in mold release agents and hydrophobic surface treatment formulations.

Packaging of LS-610/HMDO Hexamethyldisiloxane (MM, HMDO)


In 150 or 160/kg drum


Safety and Storage of LS-610/HMDO Hexamethyldisiloxane (MM, HMDO)


Store in a cool, dry place away from direct sunlight and all ignition sources. Keep containers tightly sealed.

Shipped as hazardous substance — Class 3 highly flammable liquid. 

Shelf life: 12 months minimum from manufacture date in original unopened containers.

Find Other Types of Siloxanes & Silazane by CAS Number


Silicone Resin
Your Professional Silanes & Silicones Supplier
Your Professional Silanes & Silicones Supplier
Nanjing Silfluo New Material Co., Ltd.
Contact Us
Try Our Best To Meet Your Needs
What's News At Silfluo
Copyright © Nanjing Silfluo New Material Co., Ltd. All Rights Reserved.
inquiry@silfluo.com
0086-18351817618